A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: amorphous Si ethcing
amorphous Si ethcing
2006-10-12
Young Rae Hong
2006-10-13
Isaac Chan
2006-10-13
Ankush Singal
2006-10-13
Young Rae Hong
amorphous Si ethcing
Young Rae Hong
2006-10-12
I am tring to etch PECVD grown amorphous Si using CF4 with polymer mask.
I have to etch around 40nm. (SF6 is too fast for my purpose)
However, it seems like etching behavior is not consistent.
In low power(20W_80mW/cm2_15mTorr_10sccm), it seems like that it did not
etch at all.
In medium power(60W_240mW/cm2)_15mToor_10sccm), it seems like that it etched
sometimes and didn't the other times.

What is going on? does anybody have any idea????

Thanks,

Young
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
MEMStaff Inc.
Tanner EDA by Mentor Graphics
MEMS Technology Review