---- Original message ----
>Date: Fri, 13 Oct 2006 14:58:28 -0600
>From: "qingye lu" 
>Subject: [mems-talk] two layer fabrication by AZ P4620 and SU8 2050?
>To: [email protected]
>
>Is there anyone who has the experiences about two layer fabrication by AZ
>and SU8 to share with me? Thanks a lot!
>
>I want to fabricate thin channel with AZ photoresist (about 10 microns) and
>thick bed with SU8 (about 60 microns) on 4" wafer. By combination these two
>photoresist, it seems that I need to fabricate the SU8 first and then AZ
>layer. However, the thick SU8 bed may largely affect the uniformity of the
>thin AZ coating and make the design fails. Is there anyone who knows such
>issues? Any help will be greatly appreciated

Hi,
Do you have to use AZ on top of SU8? In this paper (Hung, P. J.; Lee, P. J.;
Sabounchi, P.; Lin, R.; Lee, L. P. Biotechnology and Bioengineering 2005, 89,
1-8.), they get 50 micron SU8 2050 on top of 2 micron SU8 2002.

Huaibin Zhang