Try Specialty Coating Systems, Indianapolis, Indiana, USA, 800-356-8260
Mac McReynolds
Sr. R&D Process Engineer
Caliper Technologies
email:  [email protected]
www.calipertech.com

> ----------
> From:         Matthias Heschel
> Reply To:     Matthias Heschel;[email protected]
> Sent:         Friday, May 15, 1998 2:33
> To:   [email protected]
> Subject:      Parylene
>
> Dear MEMS community,
>
> who can provide me with information regarding Parylene:
> - manufacturers of deposition equipment
> - elastic properties of Parylene
> - transparence of nitrogen, oxygen, water and water vapor?
> Any information/help would be very much appreciated.
>
> Sincerely,
>
>