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MEMSnet Home: MEMS-Talk: photoresist peeled off together with PDMS
photoresist peeled off together with PDMS
2006-10-05
Bo Bob Huo
2006-10-05
Mike Pinelis
答复: [mems-talk] photoresist peeled off together with PDMS
2006-10-05
jianshi
2006-10-05
Bill Moffat
2006-10-10
Bo Bob Huo
2006-10-11
Gareth Jenkins
AZ 9260
2006-10-11
sebastian wicklein
2006-10-13
Isaac Chan
2006-10-13
Bo Bob Huo
2006-10-13
Mike Pinelis
2006-10-14
huy vo
photoresist peeled off together with PDMS
huy vo
2006-10-14
There are two possibilities: your photoresist is poorly adhered to the wafer or
your PDMS is too sticky because of the mixing ratio. You should try to hard bake
your wafer @ 150 for 30 minutes b4 putting on PDMS. if that doesn't solve the
problem, try the other kind of PDMS (I assume that you are awared of the two
popular types of PDMS, one is less sticky than the other)

  good luck.

  H.

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