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MEMSnet Home: MEMS-Talk: Partial Metallization of Vertical Walls
Partial Metallization of Vertical Walls
2006-10-14
Huaibin Zhang
Partial Metallization of Vertical Walls
2006-10-16
Xiaoguang "Leo" Liu
2006-10-16
g.balsubra manian
Nickel evaporation on PMMA!!!
2006-10-23
madhav rao
2006-10-23
Michael Rust
Nickel evaporation
2006-10-25
madhav rao
2006-10-26
Brent Garber
Partial Metallization of Vertical Walls
g.balsubra manian
2006-10-16
Hi Zhang.,

You can carry out lithography to pattern Psoitve PR.
Then metallization and then lift off to get the
partial metallization.

Do you find any prob with this method????

Regards
Bala.


> On 10/14/06, Huaibin Zhang  wrote:
>
> > Wow, it is a challenging task. Good thing is that
> 1mm x 1mm is not too hard to handle. I have few
> questions want to know: (1) how many cavities do you
> need to make?
> > (2) What is the relative position of the two side
> walls? Do they have to be in the opposite side?
reply
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