A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Nickel evaporation on PMMA!!!
Partial Metallization of Vertical Walls
2006-10-14
Huaibin Zhang
Partial Metallization of Vertical Walls
2006-10-16
Xiaoguang "Leo" Liu
2006-10-16
g.balsubra manian
Nickel evaporation on PMMA!!!
2006-10-23
madhav rao
2006-10-23
Michael Rust
Nickel evaporation
2006-10-25
madhav rao
2006-10-26
Brent Garber
Nickel evaporation on PMMA!!!
madhav rao
2006-10-23
Hi All,
       I am going through all possible combinations
and conditions to grow Nickel Dots. I am looking
forward to grow Nickel Dots using electron
beam lithography. Hence I would be using PMMA(poly
methyl methacrylate) e-beam resist. After patterning
this resist, we need to evaporate Nickel through
Edwards 306 Evaporator. I just wanted to know, whether
this PMMA on Silicon wafer during Nickel Evaporation
gets affected. Let me know about this.


Thanks

Regards,
Madhav
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
MEMS Technology Review
University Wafer