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MEMSnet Home: MEMS-Talk: Gold were elctroplating onto the edge of photoresist
Gold were elctroplating onto the edge of photoresist
2006-10-26
胡小东
Gold were elctroplating onto the edge of photoresist
2006-10-26
Adamson, Steve
Gold were elctroplating onto the edge of photoresist
胡小东
2006-10-26
Dear All,
   In the past two months, while we did gold elctroplating, there were two gold
"wings" extending from the gold line onto the edge of photoresist.
   photoresist: AZ1500, 2.5 micron thick.
   gold thickness: 2 micron
   "wing" thickness: 3 to 4 micron
   "wing" width: 10 to 20 micron

   current density 5.5 mA/cm2
   electoplating time 13min
   PH value: 7
   temperature: 50 degree
   Has anyone experinced the same problem? May someone would give me any useful
suggextiongs. Thanks!

   Huxiaodong




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