MEMS-talk

News	MEMSnet Home: MEMS-Talk: Wet etching SiN with photoresist Wet etching SiN with photoresist 2006-10-28 蘇俊榮 Chun-Jung Su 2006-10-31 Scott McWilliams 2006-10-31 R Zhang, Electrical & Electronic Engineering 2006-10-31 Avi Laker Wet etching SiN with photoresist Avi Laker 2006-10-31 CF4 plasma etching may be used, it helps if you have an Sio2 stop mask under your nitride. reply
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