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MEMSnet Home: MEMS-Talk: Problem on Pt depostion by FIB
Just starting out in MEMS
2006-11-02
Jose Guevarra
2006-11-02
A.E.Reinhardt
Problem on Pt depostion by FIB
2006-11-03
jpt sharma
2006-11-05
mohendra roy
Regarding residual stress
2006-11-06
[email protected]
2006-11-06
David A. Grove
2006-11-06
Beggans Michael H IHMD
Problem on Pt depostion by FIB
jpt sharma
2006-11-03
Dear Alls
  I am having the problems to deposit Pt (making electrical contacts) using dual
beam FIB. I am using e-beam depostion (not sure why I am not using Ion beam
depostion, what I heard that ion beam may destroy the sample). Since I deposited
Pt, I was expecting the metallic behaviour when cool it down to 4.2K. But what I
get is semiconducting behaviour. Do you guys the answer? Why this happen and how
to get rid of it?
  Your reply will be highly appreciated!

  JPT
reply
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