Dear Anurekha,

Try this paper MECHANICAL CHARACTERIZATION OF THIN FILMS WITH APPLICATION TO
FERROELECTRICS, Thesis by Rongjing Zhang at:
http://etd.caltech.edu/etd/available/etd-01312006-170959/unrestricted/ch3_fi
nal_R.pdf. You can access the entire paper here
http://etd.caltech.edu/etd/available/etd-01312006-170959/unrestricted/.

David Grove
Luxel Corp.
www.luxel.com

Those who cast the votes decide nothing; those who count the votes decide
everything.

Joseph Stalin

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of [email protected]
Sent: Sunday, November 05, 2006 8:52 PM
To: General MEMS discussion
Subject: [mems-talk] Regarding residual stress

 Dear all

I need to validate a model developed by me. The model gives the influence of
residual stress on deflection and pull-in for a square diaphragm. I have
found
a lot of research papers giving the experimental data for beams but i
couldn't
get the ones for square diaphragm. If anyone could suggest me few research
papers giving experimental results of bending of square diaphragm under
influence of residual stress as well as pull-in voltage to or send pdf for
the
same, i shall be grateful