Hi

Glass to glass anodic bonding will not work. one solution is that u
sputter  a thin film of silicon on the top glass substrate. and then
apply negative bias to the bottom glass and do the anodic bonding. may
be this work. Another solution is at high pressure glass to glass
fusion bonding .
May be this would be helpful.
bye


On 11/8/06, Hyun Chul Jung  wrote:
> Hello guys.
>
> I am having difficult time to bond glass to glass. Bottom substrate has
> 2um wide and deep microfluidic channels and electrodes (Ti/Au
> 200/1000A). Top substrate is just plain pyrex 7740.
> I have been trying two methods so far.
>
> First one is anodic bonding.
> I deposited SiO2 on top substrate using Ebeam evaporator. Tried to bond
> using anodic bond. It did not work.
>
> Second method is PDMS to glass bonding.
> First of all, I spined coat PDMS liquid on top substrate around 6um
> thickness and curing for 30 min at 180C on hotplate. Cool down it for
> while. Oxygen plasma treatment on both side of substrate and then place
> them together. It did not work either.
>
> If I miss some steps, please correct me. I will really appreciate if you
> guys give me any comments or recommendation.
> Thanks.