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MEMSnet Home: MEMS-Talk: Glass to glass bonding
about double coating and lithography of thick SPR220
2006-11-08
Zhang Xiao Qiang
Glass to glass bonding
2006-11-08
Hyun Chul Jung
2006-11-08
sokwon Paik
2006-11-08
Joseph Grogan
2006-11-09
邵建波
2006-11-09
Gareth Jenkins
2006-11-09
Y-bean Zhang
2006-11-09
Rashid, Mamun
2006-11-09
Indu Shekhar Bajpayee
2006-11-10
Anil Agiral
2006-11-10
Zhang Xiao Qiang
Glass to glass bonding
Gareth Jenkins
2006-11-09
The heat treatment makes a huge difference. After plasma treatment I use
a hotplate at 85C for an hour or so and it works every time (I don't
even bother cleaning the glass any more). Without it I only ever get
very patchy bonding at best.
For glass to glass you may also consider techniques involving dilute HF
and pressure. I have never this but believe surface roughness is crucial.



ÉÛ½¨²¨ wrote:
> hello guys:
> I havn't done experiments about bonding glass to glass,but I have some
> experience about PDMS bonding to glass.
> I think that after oxygen plasm treatment you should put them into
> oven at
> about 80C for nearly half an hour.It can irreversibly bond.You can try
> it.



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