Hello Jung,
Have you tried bonding of glass-based microfluidic chips at low =
temperature using concentrated Sulphuric acid and HF steam? I think you =
can try. Annealing at low-temperature (<100 ?C) or room temperature =
provides good bonding of glass slide.
More details you can find in  Bonding of glass-based microfluidic chips =
at low- or room-temperature in routine laboratory by Lingxin Chen, Guoan =
Luo?, Kehui Liu, Jiping Ma, Bo Yao, Yongchen Yan, Yiming Wang.
Sensors and Actuators B, 2006.

Regards,
Mamun Rashid


***************************************************************
Mamun-Ur-Rashid
Orion 1.12
Teesside Centre for Nanotechnology & Microfabrication
School of Science & Technology
University of Teesside.
TS1 3BA. U.K
01642342428
www.mamun.info
________________________________

From: [email protected] on behalf of Gareth Jenkins
Sent: Thu 09/11/2006 17:04
To: General MEMS discussion
Subject: Re: [mems-talk] Glass to glass bonding

The heat treatment makes a huge difference. After plasma treatment I use
a hotplate at 85C for an hour or so and it works every time (I don't
even bother cleaning the glass any more). Without it I only ever get
very patchy bonding at best.
For glass to glass you may also consider techniques involving dilute HF
and pressure. I have never this but believe surface roughness is =
crucial.