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MEMSnet Home: MEMS-Talk: about double coating and lithography of thick SPR220
about double coating and lithography of thick SPR220
2006-11-08
Zhang Xiao Qiang
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Zhang Xiao Qiang
about double coating and lithography of thick SPR220
Zhang Xiao Qiang
2006-11-10
Dear friends

Anyone has the experiences about double/multi coating and lithography of
thick SPR220. I would like to use it get a near vertical side wall of my
patterns: the holes with aspect ratio of 2:1 and diameter of 2-6 micron.
I believe it is better than AZP 4620 as their datasheet show.

Any comments and recommendation are welcomed and highly appreciated.

Thank you & have a nice day!
Best regards!

Dr. Zhang XiaoQiang

Singapore-MIT Alliance
Department of Materials Science and Engineering National University of
Singapore
Email:[email protected]
reply
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