>
>Dear colleagues,
>
>I am working on deep x-ray lithography in PMMA up to 1 cm and I am having
>problems with rough surfaces. (Often bubble like structures though I don't
>overexpose).
>
>I am trying to find out more about PMMA radiation damage and PMMA
>development in very deep structures. Especially effects occuring when one
>overexposes or exposes with high ratio (gasing out, gas diffusion speed in
>PMMA etc.) are things I would be very interested in!
>
>Can anyone help me find appropriate literature?
>Can anyone share their own experiences?
>I would also like to get in contact with people doing experiments in the
>same field.
>
>Best regards
>
>Georg
>
>-------------------------------------
>Georg Aigeldinger, Research Associate
>Center for Advanced Microstructures and Devices, CAMD
>Louisiana State University
>Baton Rouge, LA 70803, USA
>

Dear Sir

I am also working on deep x-ray lithograpy in PLS(Pohang Light Sourece)
We are going to construct the dedicated beamline for LIGA and will provide
the light to user
by early of next year.

I am also very intrested in your concern.

Would you share your experience and info with me ?

 Thanks

  Suksang Chang