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MEMSnet Home: MEMS-Talk: Anisotropic Wet Etching of Silicon nitride
Anisotropic Wet Etching of Silicon nitride
2006-11-28
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2006-11-28
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2006-11-29
Roger Brennan
2006-11-29
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2006-11-29
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Ingredient of s1813 and toluene
2006-11-30
Bin Liu
2006-11-30
Roger Shile
Anisotropic Wet Etching of Silicon nitride
[email protected]
2006-11-28
Dear colleagues,

Does anybody knows a way how to ANISOTROPICALLY wet etch Silicon Nitride?

Thanks in advance for your feedback.

Cheers,
Ed S

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