Ed:

It would be much easier to plasma etch silicon nitride anisotropically. I don't
know of a masking material that would hold up to 180 degree C. Phosphoric Acid
bath. Bob Henderson


-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Tue, 28 Nov 2006 12:28 PM
Subject: [mems-talk] Anisotropic Wet Etching of Silicon nitride


Dear colleagues,

Does anybody knows a way how to ANISOTROPICALLY wet etch Silicon Nitride?

Thanks in advance for your feedback.

Cheers,
Ed S