Do not ALL wet etches act isotropically?

Roger Brennan
Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
[email protected]
775-853-5900

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of [email protected]
Sent: Tuesday, November 28, 2006 2:29 PM
To: [email protected]
Subject: Re: [mems-talk] Anisotropic Wet Etching of Silicon nitride


Ed:

It would be much easier to plasma etch silicon nitride anisotropically. I
don't know of a masking material that would hold up to 180 degree C.
Phosphoric Acid bath. Bob Henderson


-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Tue, 28 Nov 2006 12:28 PM
Subject: [mems-talk] Anisotropic Wet Etching of Silicon nitride

Dear colleagues,

Does anybody knows a way how to ANISOTROPICALLY wet etch Silicon Nitride?