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MEMSnet Home: MEMS-Talk: Silicon oxide etch
Polyurethane PMC 790 : bubbles problem
2006-11-29
RABBIA Laurent
Silicon oxide etch
2006-11-29
Andrea Mazzolari
2006-11-29
Hongjun-ECE
2006-11-29
Kirt Williams
2006-11-30
Michael Prömpers
Silicon oxide etch
Andrea Mazzolari
2006-11-29
Hi all,
I need to etch silicon oxide using a silicon nitride mask. Any suggestion
about a wet etchant which will etch only silicon oxide preserving silicon
nitride?

Best regards,
Andrea

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