Buffered oxide etchant (BOE) should have very high selectivity.

Good luck,

------------------------------------
Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology Core Facility
(NCF formerly MAL)
University of Illinois at Chicago
3064 ERF Building
842 W. Taylor St., Chicago, IL 60607
Tel. 312-355-1259, Fax: 312-413-0447
------------------------------------
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrea Mazzolari
Sent: Wednesday, November 29, 2006 11:05 AM
To: 'General MEMS discussion'
Subject: [mems-talk] Silicon oxide etch

Hi all,
I need to etch silicon oxide using a silicon nitride mask. Any suggestion
about a wet etchant which will etch only silicon oxide preserving silicon
nitride?