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MEMSnet Home: MEMS-Talk: Ingredient of s1813 and toluene
Anisotropic Wet Etching of Silicon nitride
2006-11-28
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2006-11-28
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2006-11-29
Roger Brennan
2006-11-29
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2006-11-29
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Ingredient of s1813 and toluene
2006-11-30
Bin Liu
2006-11-30
Roger Shile
Ingredient of s1813 and toluene
Bin Liu
2006-11-30
Hi all

I know this is might be a dumb question. But could someone tell me what
is the ingredient of s1813 and why toluene can make it harder? Or if you
can tell me where to look up it...

Many thanks!

Yours
Bin

--
Bin Liu
PhD Candidate
Electrical and Computer Engineer Department
Duke University
3583 FCIEMAS
Box 90291
Durham, NC 27708
Tel: (919)660-5567
Fax: (919)660-5293
Email:[email protected]

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