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MEMSnet Home: MEMS-Talk: dielectric breakdown of SiN and SiO2
dielectric breakdown of SiN and SiO2
2006-11-30
[email protected]
dielectric breakdown of SiN and SiO2
[email protected]
2006-11-30
Hi all,
   I am looking for the information about dielectric breakdown strength and
dielectric constant of SiO2 film and SiN film. Does anyone know the information
or tell me how I can get it?
Thank you!

Zhang D.Q.
reply
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