Andrea:
  I guess you needed to use photoresist to selectively protect the nitride while
creating the nitride mask right? why not use the same resist mask to etch the
nitride? If it is a different mask, just use a new photoresist mask to etch the
oxide using 6:1BOE.

  huy



  From: "Andrea Mazzolari"
Subject: [mems-talk] Silicon oxide etch
To: "'General MEMS discussion'"
Message-ID: <[email protected]>
Content-Type: text/plain; charset="us-ascii"

Hi all,
I need to etch silicon oxide using a silicon nitride mask. Any
suggestion
about a wet etchant which will etch only silicon oxide preserving
silicon
nitride?