If it is not LPCVD nitride they will be etched out by KOH. Even LPCVD
nitride will etch but slowly.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrea Mazzolari
Sent: Wednesday, December 06, 2006 3:21 PM
To: [email protected]
Subject: [mems-talk] silicon nitride bridges and cantilevers

Hi all, i'm quietly new to silicon micromachinign.
i want to realize silicon nitride cantilevers and beams.
After silicon nitride pattering, i've tried to release cantilevers and
membranes using KOH underetch. All bridges and cantilever were lost:
during the underetch, they become thinner and thinner...
Which could be the problem ?