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MEMSnet Home: MEMS-Talk: Polished silicon wafer's flatness
Polished silicon wafer's flatness
2006-12-07
st20000
Polished silicon wafer's flatness
st20000
2006-12-07
Hello all ,

I try to improve the flatness of single polished silicon wafer,but it is still
worse .

Now 6 inch wafer's TTV average is 3um or so , STIR average is 1 or so .

Can anyone suggest me any improvements on polisher and mounter .

Thanks in advance .


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science technology
2006-12-07

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