What is your ebeam resist?  Generally you want to bake to remove
volatile solvents which could effect the patterning.

Seth B.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of jpt sharma
Sent: Thursday, December 07, 2006 11:37 AM
To: General MEMS discussion
Subject: [mems-talk] E-beam lithography

HI all
  Is there anyway to do ebeam lithography with out baking the e-beam
resist after spinning? OR baking at low temperaute <80 C