A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: silicon nitride bridges and cantilevers
silicon nitride bridges and cantilevers
2006-12-06
Andrea Mazzolari
2006-12-06
shay kaplan
2006-12-08
Andrea Mazzolari
2006-12-09
shay kaplan
2006-12-10
Andrea Mazzolari
LPCVD trap exhaust
2006-12-12
Andrea Mazzolari
silicon nitride bridges and cantilevers
shay kaplan
2006-12-09
Andrea,
If the cantilever base is does not have a diameter ~10 times or more than
the nitride thickness they will lift off. Id the base is large enough, and
oxide will remain at the center.
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrea Mazzolari
Sent: Friday, December 08, 2006 11:45 PM
To: General MEMS discussion
Subject: Re: [mems-talk] silicon nitride bridges and cantilevers

It is LPCVD silicon nitride. Thickness is 70nm.
Under silicon nitide there are 20nm of LPCVD silicon dioxide.
Silicon dioxide is etched by KOH, right ? And so the underlying silicon
dioxide layer was removed. Maybe this is the cause i've lost cantilevers and
bridges ?
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
MEMStaff Inc.
Mentor Graphics Corporation