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MEMSnet Home: MEMS-Talk: oxygen plasma etching of polyester (PET)
oxygen plasma etching of polyester (PET)
2006-12-11
jianshi
2006-12-11
nate lipkowitz
oxygen plasma etching of polyester (PET)
jianshi
2006-12-11
hello

If someone has tried oxygen plasma etching of polyester(PET)?
How about the etching speed ?

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Jian SHI
Ecole Normale Supérieure de Paris
Département de Chimie
24 Rue Lhomond, 75231 Paris cedex05, France
Tél : +33 1 44 32 24 21
Fax: +33 1 44 32 24 02
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