Your question requires some clarification, as glow discharges are generally
not in thermal equilibrium.  Temperatures within such a discharge range from
near ambient for neutral species to electron temperatures >1000 degC.

Roger Shile

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of yilei zhang
Sent: Friday, December 08, 2006 10:19 AM
To: [email protected]
Subject: [mems-talk] DRIE plasma temperature

Hi all,
Does anybody know the general temperature of plasma used in commercial DRIE?
Or any good references about DRIE etch process? Thanks a lot.