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MEMSnet Home: MEMS-Talk: Getter for MEMS vacuum packaging
Getter for MEMS vacuum packaging
2006-12-12
GARCIA BLANCO Sonia
2006-12-12
Shay Kaplan
Getter for MEMS vacuum packaging
GARCIA BLANCO Sonia
2006-12-12
Dear All,

I was wondering if somebody could suggest a good getter for vacuum packaging of
MEMS structures.

Thanks a lot for your advice!

Regards,

Sonia.
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