Hi all, here we have a LPCVD system. For exhaust management we use a
home-made trap positionated at the exit of the furnace.
I'm looking for something better than what we actually have.
Until now i've found those products:
http://www.massvac.com/pages/prod_vacuum_traps.html
http://www.mksinst.com/product/product.aspx?ProductID=488&source=search

Do you have any other suggestion ?

Best regards,
Andrea Mazzolari