A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Glas Frit Bonding
etch through hole on pyrex glass
2006-12-12
Hui Ju
2006-12-12
Shay Kaplan
Glas Frit Bonding
2006-12-13
Erik Jung
2006-12-13
Gareth Jenkins
2006-12-13
Shay Kaplan
2006-12-13
Anil Agiral
2006-12-14
Pradeep Dixit
Glas Frit Bonding
Erik Jung
2006-12-13
Dear all,
When bonding Si with glass (borofloat 33) using Ferro FX036 with ~40µm
(prefired) thickness, I don´t obtain good mechanical strength. Same process
with glass/glass and Si/Si works perfectly.
A cooldownrate of less than 13K/min has been used.
Do you have any suggestions here?
Regards!
Erik

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
The Branford Group
MEMStaff Inc.
MEMS Technology Review