At 11:13 AM 5/22/98 -0400, you wrote:
>
>Does anyone know the acoustic impedance and density of silicon nitride?
>Does it make a difference if the SiN is sputtered, PECVD, or LPCVD?
>
>Thanks,
>Carl

Hello Carl,

I can't answer  about acoustic impedance of SiN but concerning the density
of a such material, it depends on your deposition process !!!!

In general, it says that a sputtered SiN is more porous than a PECVD or
LPCVD SiN.
The main difference between these last method is the temperature of
deposition, lower in the first case. If you're looking for an optical
quality, prefer a PECVD which will give you lower internal stresses.

I guess you'll have a lot of answers !!

good luck for your job

Eric

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Eric Bonnotte

Schlumberger Wireline and Testing
SRPC- Clamart
26 rue de la cavee
92140 Clamart
FRANCE

Tel : +33 (0)1 45 37 22 95
Fax : +33 (0)1 45 37 26 93

email : [email protected]
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