BOE, as opposed to just regular HF, is designed to be less aggressive
on photoresists in general.  You should be fine sticking with what
you have.  If you must change it is more important that you get a
resist that is good for the feature size and etch recepies that you
use.

Nicolas Duarte

At 1:50 PM +0100 12/15/06, Andrea Mazzolari wrote:
>Hi all, i need a photoresist resitant to boe etchants. Until now i used
>shipley s1813, it worked well, but now it is expired date.
>I'm planning to buy again shipley s1813, or is there something better ?
>
>Best regards,
>Andrea Mazzolari
>
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