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MEMSnet Home: MEMS-Talk: about lithography
about lithography
2006-12-23
abhaya joshi
2006-12-23
Rajib Ahmed
about lithography
abhaya joshi
2006-12-23
hi guyes,
i am having a problem.
i am doign lithography on surface, which is having 20um deep cavities. i
have to put photoresist on that.but while doing lithography the photoresist
at corner (at top surface).
i am using positive resist S1813 and spinning at speed of 3000RPM.
can anybody tell me what is the problem?
-abhay joshi
university of pune.
reply
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