You should explain if you heat the solution while etching.
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>From : [email protected]
To : "Qiao Dayong" [email protected],"General MEMS discussion" mems-
[email protected]
Cc :
Date : Tue, 26 Dec 2006 10:38:21 +0530
Subject : Re:[mems-talk] BHF precipitates ?
> Dear Friend,
> Are you filtering the NH4F and DI water solution or not?
> We are filtering the solution and then mixing the resultant soln. with HF acc.
> to our concen. requirement. We have not faced any problems.
> Try it.