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MEMSnet Home: MEMS-Talk: SIMOX (Separation by Implantation Of Oxygen) of Germanium
SIMOX (Separation by Implantation Of Oxygen) of Germanium
2007-01-05
Long Chen
SIMOX (Separation by Implantation Of Oxygen) of Germanium
Long Chen
2007-01-05
Hi, has anyone worked with or heard of SIMOX (Separation by Implantation
Of Oxygen) of Germanium wafer, similar to the one done regularly in
Silicon industries? Please let me know if you have any information
related. Thanks a lot,
Long


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