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MEMSnet Home: MEMS-Talk: Any good selective etch process to etch P-type Si and stops at intrinsic Si?
Any good selective etch process to etch P-type Si and stops at intrinsic Si?
2007-01-10
Chris Park
Any good selective etch process to etch P-type Si and stops at intrinsic Si?
Chris Park
2007-01-10
Hi All
Does anyone know good etch process or any service provider to
selectively etch p-type Si substrate but stops the etching at undoped
(very lightly unintentional p doped) Si epi?
Thanks in advance,
Chris Park
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