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MEMSnet Home: MEMS-Talk: Releasing of the nitride suspended structure
Releasing of the nitride suspended structure
2007-01-09
deepak agrawal
2007-01-09
erkin seker
2007-01-10
deepak agrawal
2007-01-12
yun wang
Releasing of the nitride suspended structure
deepak agrawal
2007-01-10
Can i use the dry etching to etch the Aluminum so that there will be no
chance of stiction. Is there anyone has the knowledge about dry etching
recipe of Aluminum.

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