You can't clean pdms with solvents but you can try dry etching (RIE) with O2!

> Hi, I have tried several ways to clean the PDMS thin film on the Silicon
> pattern(including HF, Piranha,etc). But the result is not good and
> especially I want to clean the PDMS in the hole of Si chip. Does anybody
> know how to clean it or any paper mentioned the way of cleaning?