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MEMSnet Home: MEMS-Talk: SiO2 lpcvd deposition
SiO2 lpcvd deposition
2007-01-13
Andrea Mazzolari
2007-01-15
Qiao Dayong
2007-01-15
Andrea Mazzolari
SiO2 lpcvd deposition
Andrea Mazzolari
2007-01-13
Hi all. I need to deposit 3 micron of LPCVD SiO2. My gas sources are
diclorosilane (DCS) and O2. Could you suggest me the best deposition
conditions in order to obtain the highest possible deposition rate ?
References to articles will be very appreciated.
Best regards,
Andrea
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