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MEMSnet Home: MEMS-Talk: Cyclohexane sublimation
Cyclohexane sublimation
2007-01-15
Ernesto Di Paola
Cyclohexane sublimation
Ernesto Di Paola
2007-01-15
Hi all,
I'm tring to release cantilever structures by means of the sublimation of
the cyclohexane at low pressure (10e-1 mbar). My problem is that after the
sublimation some drops (like gel) remain on the substrate. Maybe my
sublimation process is not effective...
Could anybody provide me the phase diagram of the cyclohexane?

Best regards,
Ernesto Di Paola
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