Dadhichi:

What type of plasma etch system do you have? Bob Henderson


-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Mon, 15 Jan 2007 7:52 AM
Subject: [mems-talk] nitride etch


hi,
could anybody share with me her/his nitride etching recepie please?!!! wish to
etch away ~200nm of nitride (SiNx) from a polymer substrate! cheers