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MEMSnet Home: MEMS-Talk: Lift-off Recipe
Lift-off Recipe
2007-01-15
Ravi Shankar
2007-01-16
Yue Mun Pun, Jeffrey
2007-01-16
sachin narwade
2007-01-16
Joseph Grogan
2007-01-16
Bill Moffat
2007-01-17
Yue Mun Pun, Jeffrey
Lift-off Recipe
Ravi Shankar
2007-01-15
Hi all,

   I need to use lift-off process for my device fabrication.. So far
we haven't standardised lift-off process in our lab. We are suing
S1813 and HNR 120 photoresists... Is it possible to achieve lift-off
process with these low thickness photoresists? Can any one suggest
recipe for lift-off process.. suggestions will be highly appreciated.
Thanks in advance..

Regards,
A. Ravi Shankar.
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