According to the Handbook of Metal Etchants (isbn 0-8493-3623-6, EXCELLENT
resource), hot aqua regia (3 parts HCL, 1 part HNO3) non diluted is the only
wet etchant for iridium known.  They mention it etches very slowly.

David Nemeth
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Mantavya  Sinha
Sent: Saturday, January 27, 2007 10:36 PM
To: General MEMS discussion
Subject: [mems-talk] wet etch recipe for Iridium (Ir)

hi guyz,
can anyone tell me the wet etch recipe for Iridium (Ir). It seems to be
quite resistive to hot(85'C) dilute(1:1) aqua regia. Also it should have
selectivity over IrSi.