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MEMSnet Home: MEMS-Talk: Re: deflection measurements
Re: deflection measurements
1998-05-31
Dr. Matthias Scherge
1998-06-01
Shuvo Roy
1998-06-01
Jonathan Bernstein
1998-06-03
[email protected]
Re: deflection measurements
Shuvo Roy
1998-06-01
Contact Leitz/Leica...they have microscope attachments
that will let you do interferometry with regular
microscopes.


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| Shuvo Roy                                                     |
| Research Assistant, Microelectromechanical Systems Group      |
|                                                               |
|Office: Rm. 811 Glennan Bldg.                                  |
|        Department of Electrical Engineering & Applied Physics |
|        Case Western Reserve University                        |
|        Cleveland, Ohio 44106                                  |
|        USA                                                    |
|                                                               |
|Telephone: 216-368-3051        Fax: 216-368-2668               |
|                                                               |
|E-mail:  [email protected]            [email protected]       |
|                                                               |
|WWW: http://mems.cwru.edu/roy                                  |
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