Dear Mr. Sandoval-Ibarra:

A crude measurement can of course be made by turning the knob on the microscope
up and down and using the limited depth of field of the objective, but this is
only accurate to a micron or two.  The best instrument is the Wyko
interferometer, which maps the entire surface with nm precision.  There are
other commercial products as well, but we love our Wyko.  I think it runs about
$100k, so it is fairly expensive.

     Jon Bernstein





At 09:08 PM 5/29/98 -0600, you wrote:

>

>Dear sirs,

>

>In the design of cantilever beams and doubly-supported beams many authors

>have been used interferometric techniques to measure the deflection of

>those microestructures. Could anyone E-mail me where I can buy an

>optical microscope to measure vertical deflection?

>

>Thanks in advance

>

>Dr. F. Sandoval-Ibarra

>Microelectronics Laboratory

>INAOE, Puebla (Mexico)

>Phone: + 52 (22) 47 20 11

>Fax: + 52 (22) 47 05 17

>

>

>

Jonathan Bernstein

MEMS Technology Center

Draper Labs, MS 37

555 Technology Square

Cambridge, MA 02139 USA


[email protected]

Tel. (617) 258-2513

Fax  (617) 258-4238