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MEMSnet Home: MEMS-Talk: Equipment for ramped heating
Equipment for ramped heating
2007-02-02
Peng Li (Paul)
2007-02-02
[email protected]
2007-02-02
Peng Li (Paul)
2007-02-02
Gareth Jenkins
Equipment for ramped heating
Peng Li (Paul)
2007-02-02
Hey everybody,

I am making mold on silicon wafer by SU-8 photoresist, however, sometimes
I get "wrinkled surface". I heared that hotplate is better than convection
oven, ramped heating is also helpful, but I am not sure.

Could you please recommend an inexpensive equipment for ramped heating of
SU-8 mold? Is there any other better ways to avoid wrinkled surface?

Thanks!

Peng Li

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