Perhaps this is far more than you expect, but Zygo's Optical Profilometer would
do this very well.  Model NewView 200 is $100,000.  Zygo is in Connecticut at
860-704-5125

Glen Dunham
Pacific Northwest National Laboratory
509-376-4397

        ----------
        From:   M.C. Federico  Sandoval
        Reply To:       M.C. Federico  Sandoval;[email protected]
        Sent:   Friday May, 29 8:08 PM
        To:     [email protected]
        Subject:        deflection measurements


        Dear sirs,

        In the design of cantilever beams and doubly-supported beams many
authors
        have been used interferometric techniques to measure the deflection of
        those microestructures. Could anyone E-mail me where I can buy an
        optical microscope to measure vertical deflection?

        Thanks in advance

        Dr. F. Sandoval-Ibarra
        Microelectronics Laboratory
        INAOE, Puebla (Mexico)
        Phone: + 52 (22) 47 20 11
        Fax: + 52 (22) 47 05 17