Hi all,
I need super flat silicon wafers.
Is there a parameter which quantifies flatness of a wafer?
I know the meaning of TTV and BOW and Warp. Is there something else which
quantifies flatness of a silicon wafer ?
A low TTV, BOW and Warp values means good flatness, is this correct ?
It seams that it's not so hard to find manufacturers of silicon wafers with
a TTV<5 um, and usually this is considered a good value.
Which values of bow and warp are usualy considered as a good value ?

Best regards,
Andrea Mazzolari.